The turbo molecular pump is a mechanical vacuum pump with a rotor created of a fast rotating turbine blade&comma helical groove&comma or a combination of the two&period of time The gas molecules enter the turbo molecular pump and collide with the surface of the rotors producing kinetic power leading to the gas molecules to shift towards the turbomolecular pump exhaust&interval
The pumps offer you total magnetic levitation rotor&comma which provides a thoroughly clean&comma reputable vacuum for present-day semiconductor and photo voltaic industries&period It characteristics a 5 axis magnetic bearing and fifty percent rack controller requiring no tuning or battery backup&comma large compression&comma and corrosion resistant&time period
Design | F-400&sol3500 |
Capability&lparl&sols&rpar | 3500 |
H2 Compression Ratio | 5× ten 2 |
N2 Compression Ratio | 1× ten eight |
Final Force&lparPa&rpar | ≤ 6× 10 -six |
Rotation Pace&lparRPM&rpar | 13500 |
Operate up time&lparmin&rpar | < 18 |
Outlet Flange | KF100&lparDN100 ISO-KF&rpar |
Inlet Flange | LF400&lparDN400 ISO-K&rpar |
Bearing | Ceramic bearing |
Backing pump&lparl&sols&rpar | thirty |
CZPT water&lparº C&rpar | ≤ 25 |
Heating T&lparº C&rpar | ≤ eighty |
Ambient T&lparº C&rpar | five~40 |
Oil stuffed&lparml&rpar | a hundred and fifty |
Install CZPTation | vertical&pm five |
Weight&lparkg&rpar | 136 |