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High Vacuum Molecular Pump

High Vacuum Molecular Pump

The turbo molecular pump is a mechanical vacuum pump with a rotor created of a fast rotating turbine blade&comma helical groove&comma or a combination of the two&period of time The gas molecules enter the turbo molecular pump and collide with the surface of the rotors producing kinetic power leading to the gas molecules to shift towards the turbomolecular pump exhaust&interval

The pumps offer you total magnetic levitation rotor&comma which provides a thoroughly clean&comma reputable vacuum for present-day semiconductor and photo voltaic industries&period It characteristics a 5 axis magnetic bearing and fifty percent rack controller requiring no tuning or battery backup&comma large compression&comma and corrosion resistant&time period

Design F-400&sol3500
Capability&lparl&sols&rpar 3500
H2 Compression Ratio 5× ten 2
N2 Compression Ratio 1× ten eight
Final Force&lparPa&rpar ≤ 6× 10 -six
Rotation Pace&lparRPM&rpar 13500
Operate up time&lparmin&rpar < 18
Outlet Flange KF100&lparDN100 ISO-KF&rpar
Inlet Flange LF400&lparDN400 ISO-K&rpar 
Bearing Ceramic bearing
Backing pump&lparl&sols&rpar thirty
CZPT water&lparº C&rpar ≤ 25
Heating T&lparº C&rpar ≤ eighty
Ambient T&lparº C&rpar five~40
Oil stuffed&lparml&rpar a hundred and fifty
Install CZPTation vertical&pm five
Weight&lparkg&rpar 136

High Vacuum Molecular Pump

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