产品说明
Working principle
The vacuum in dry screw pumps is created through 2 parallel-arranged screw rotors that rotate in opposite directions. These rotors trap the gas coming in through the inlet and deliver it to the gas discharge or pressure side. As the gas is getting compressed, there is no contact between the rotors. This does away with any need for the compression chamber to have any operating fluids or lubrication.
The lubricant used to lubricate the gears and shaft seal is sealed in the gearbox by the shaft seal. The pump can be cooled either directly by circulating cooling water or by a cooling unit with fan and radiator.
The dry screw vacuum pump adopts a special rotor pitch design, compared with the ordinary rotor pitch design, reduce the energy consumption by about 30%, the temperature rise of the exhaust end is reduced by about 100 ºC, the reliability and stability of the operation of the product is greatly improved, can be suitable for any working conditions of vacuum.
The dry screw pumps can be widely used in solvent recovery, vacuum drying, concentration, crystallization, distillation and other processes in the chemical and pharmaceutical industries, vacuum extrusion and molding in the plastic and rubber industries, vacuum degassing in the metallurgical industry; vacuum degassing and drying in the solar energy, microelectronics, lithium battery and other industries.
Pump body and end caps: high-strength cast iron.
Pump body and end caps: high strength cast iron.
Screw rotor: ductile cast iron.
Anti-corrosion coating: corrosion-resistant Hastelloy.
Synchronous gears: alloy steel.
Radial lip seal: imported PTFE mixture or
high-temperature resistant fluorine rubber;
Seal bushings: stainless steel surface covered with ceramic.
Flow chart
Main features
1. The screw rotor is designed with variable pitch structure, the ultimate vacuum can reach below 1Pa, which can meet all kinds of vacuum processing from atmosphere to high vacuum.
2. Oil free – Adapt to various special working conditions for reliable use.
3. It can operate reliably in the pressure range from atmosphere to several Pa.
4. No friction between moving parts, simple structure, lower operation and maintenance cost.
5. Nitrogen seal and composite seal design is optional, which has the benefit of good reliability, low cost of use, simple maintenance.
6. The rotor is dynamically balanced at high speed and the motor is connected by flange, with high concentricity, low vibration and low noise.
7. Hastelloy anti-corrosion coating is optional for rotor surface, condensable material is not easy to condense in the pump cavity, better corrosion resistance.
8. Compared with oil seal pump, liquid ring pump, there is no waste gas, no waste liquid, no waste oil emission, energy saving and environmental friendly.
It can be used alone or with Roots vacuum pump, air-cooled Roots vacuum pump, molecular vacuum pump, etc. to obtain an oil-free high vacuum system.
The benefit of dry screw vacuum pump compared to liquid ring vacuum pump:
-Shorten the process cycle and improve production efficiency
-Reduce water consumption
-Save energy
-Improve product quality
-Can recover solvent by reducing the drying time of products
-Reduce the cost of wastewater and waste gas treatment
A CASE in a pharmaceutical factory
Process introduction:The penicillin sodium salt solution is fed into the crystallization tank through vacuum. By steam heating, agitator stirring, and adding butanol, the water and butanol in the penicillin solution are pumped into the condenser and condensed into the liquid collecting tank, which can be reused.
Process requirements:
1. The volume of crystallization tank is 7.5m3, and about 4.5m3 penicillin solution is added in the process.
2. Before entering the crystallization tank, the water content of penicillin solution is about 20%, and after crystallization, the water content is required to be about 1%.
3. Vacuum feeding for 2h, then adding butanol for 30min, and then starting to crystallize. The process requires low temperature and fast speed, and the lower the temperature, the better the quality of penicillin. The shorter the reaction time, the better.
4. Vacuum degree requirements: the vacuum degree shall be kept above -0.097MPa. High vacuum degree can reduce the reaction temperature and shorten the reaction time.
The previous vacuum system was 2BE1252+air ejector, which is now transformed into a dry screw vacuum pump. The comparison table of test data is as follows:
| vacuum system | 2BE1252+ejector | DVP 1600 screw pump |
| Feeding time (h) | 2 | 1.5 |
| Liquid temperature at the beginning of crystallization (ºC) | 31.5 | 16.6 |
| Crystallization time (h) | 6 | 4.5 |
| Time from crystallization to liquid coming out (min) | 30 | 15 |
| Crystal quality | average | good |
| Power consumption (KW) | 45 | 37 |
| Water consumption (m3) | 26.4 | 0.72 |
Economic benefit analysis:
| Cost saving(USD) | Remark | |
| Water consumption and treatment | 130 | Water cost: $0.65/m3, water treatment: 30/m3 |
| 电源 | 15 | $0.15/Kwh |
| Labor, production efficiency | 43 | Reduced from 6 hour to 4.5 hour |
| Sum up | 188 |
Please contact us for a detailed report of economic benefit analysis for your applications!
Configuration
Standard configuration:
Machine base, pump head, coupling, motor, driving screen, air inlet connector, check valve, vacuum gauge, manual filling valve exhaust port muffler.
Optional accessories:
Inlet filter, inlet condenser, solvent flushing device, nitrogen purging device, nitrogen sealing device, exhaust port condenser, solenoid filling valve, cooling water flow switch, temperature sensor, pressure transmitter.
应用
| Leak Detection | Metallurgy | Industrial furnace | Lithium Battery |
| Chemical, pharmaceutical | Wind tunnel test | Power Industry | Vacuum coating |
| Microelectronics industry | Drying Process | Packaging and Printing | Solar Energy |
| Exhaust gas recovery |
产品参数
Technical data of Variable pitch Dry screw vacuum pump
| Spec. 模型 |
Nominal pumping speed(50Hz) | Ultimate pressure | Nominal motor rating (50Hz) | Nominal motor speed (50Hz) | Noise level Lp | Maximum cooling water required |
Suction Connection size | Discharge Connection size | Weight (Without Motor) |
| m³/h | Pa | kw | 转速 | 分贝(A) | L/min | mm | mm | 公斤 | |
| DVP-180 | 181 | 2 | 4 | 2900 | 82 | 8 | 50 | 40 | 280 |
| DVP-360 | 354 | 2 | 7.5 | 2900 | 83 | 10 | 50 | 40 | 400 |
| DVP-540 | 535 | 2 | 11 | 2900 | 83 | 10 | 50 | 40 | 500 |
| DVP-650 | 645 | 1 | 15 | 2900 | 84 | 20 | 65 | 50 | 600 |
| DVP-800 | 780 | 1 | 22 | 2900 | 86 | 30 | 100 | 80 | 800 |
| DVP-1600 | 1450 | 1 | 37 | 2900 | 86 | 40 | 125 | 100 | 1200 |
Technical data of Constant pitch Dry screw vacuum pump
| Spec. 模型 |
Nominal pumping speed(50Hz) | Ultimate pressure | Nominal motor rating (50Hz) | Nominal motor speed (50Hz) | Noise level Lp | Maximum cooling water required |
Suction Connection size | Discharge Connection size | Weight (Without Motor) |
| m³/h | Pa | kw | 转速 | 分贝(A) | L/min | mm | mm | 公斤 | |
| DSP-140 | 143 | 5 | 4 | 2900 | 82 | 10 | 50 | 40 | 240 |
| DSP-280 | 278 | 5 | 7.5 | 2900 | 83 | 20 | 50 | 40 | 350 |
| DSP-540 | 521 | 5 | 15 | 2900 | 83 | 30 | 65 | 50 | 550 |
| DSP-650 | 617 | 5 | 18.5 | 2900 | 84 | 45 | 65 | 50 | 630 |
| DSP-720 | 763 | 5 | 22 | 2900 | 85 | 55 | 80 | 80 | 780 |
| DSP-1000 | 912 | 5 | 30 | 2900 | 86 | 70 | 100 | 80 | 880 |
Note: The cooling water volume of the dry screw vacuum pump provided in the table is the amount under 20ºC room temperature water. When the dry screw vacuum pump uses cooling device, the cooling water will be increased, the difference of inlet and outlet water temperature is generally controlled below 7ºC is appropriate.
尺寸
常见问题
Q: What information should I offer for an inquiry?
A: You can inquire based on the model directly, but it is always recommended that you contact us so that we can help you to check if the pump is the most appropriate for your application.
Q: Can you make a customized vacuum pump?
A: Yes, we can do some special designs to meet customer applications. Such as customized sealing systems, speical surface treatment can be applied for roots vacuum pump and screw vacuum pump. Please contact us if you have special requirements.
Q: I have problems with our vacuum pumps or vacuum systems, can you offer some help?
A: We have application and design engineers with more than 30 years of experience in vacuum applications in different industries and help a lot of customers resolve their problems, such as leakage issues, energy-saving solutions, more environment-friendly vacuum systems, etc. Please contact us and we’ll be very happy if we can offer any help to your vacuum system.
Q: Can you design and make customized vacuum systems?
A: Yes, we are good for this.
Q: What is your MOQ?
A: 1 piece or 1 set.
Q: How about your delivery time?
A: 5-10 working days for the standard vacuum pump if the quantity is below 20 pieces, 20-30 working days for the conventional vacuum system with less than 5 sets. For more quantity or special requirements, please contact us to check the lead time.
Q: What are your payment terms?
A: By T/T, 50% advance payment/deposit and 50% paid before shipment.
Q: How about the warranty?
A: We offer 1-year warranty (except for the wearing parts).
Q: How about the service?
A: We offer remote video technical support. We can send the service engineer to the site for some special requirements.
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| 售后服务： | Online Video Instruction |
|---|---|
| 保修： | 1 年 |
| Nominal Pumping Speed(50Hz): | 645 M3/H |
| Ultimate Pressure: | 5 PA |
| Nominal Motor Rating(50Hz): | 15 Kw |
| Nominal Motor Speed(50Hz): | 2900 Rpm |
What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?
Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:
Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.
Here are some key roles of vacuum pumps in semiconductor manufacturing:
1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.
2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.
3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.
4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.
5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.
6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.
7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.
8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.
Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.
Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.
真空泵能否用于太阳能电池板的生产？
是的，真空泵广泛用于太阳能电池板的生产。下面是详细说明：
太阳能电池板又称光伏（PV）板，是一种将太阳光转化为电能的装置。太阳能电池板的制造过程涉及多个关键步骤，其中许多步骤都需要使用真空泵。真空技术在确保太阳能电池板生产的效率、可靠性和质量方面发挥着至关重要的作用。以下是使用真空泵的一些关键领域：
1.硅锭生产：太阳能电池板制造的第一步是生产硅锭。这些硅锭是纯晶体硅的圆柱块，是太阳能电池的原材料。真空泵用于 Czochralski 工艺，该工艺包括在石英坩埚中熔化多晶硅，然后从熔化的硅中缓慢拉出单晶硅锭。在晶体生长过程中，真空泵通过去除杂质和防止污染来创造受控环境。
2.晶片化：硅锭生产出来后，要进行晶圆切割，将硅锭切成薄晶圆。线锯中使用真空泵来创造低压环境，帮助冷却和润滑切割线。真空还有助于清除切片过程中产生的硅碎片，确保切割干净、精确。
3.太阳能电池生产：真空泵在太阳能电池生产的各个阶段都发挥着重要作用。太阳能电池是太阳能电池板中将太阳光转化为电能的独立单元。真空泵用于以下过程：
- 扩散：在扩散过程中，将磷或硼等掺杂剂引入硅晶片，以产生所需的电气特性。扩散炉中使用真空泵为扩散过程创造受控气氛，并清除可能影响太阳能电池质量的任何杂质或气体。
- 沉积：在硅晶片上沉积抗反射涂层、钝化层和电极材料等薄膜。真空泵用于各种沉积技术，如物理气相沉积（PVD）或化学气相沉积（CVD），为精确、均匀的薄膜沉积创造必要的真空条件。
- 蚀刻：蚀刻工艺用于在太阳能电池上形成所需的表面纹理，从而增强光捕获并提高效率。真空泵用于等离子蚀刻或湿蚀刻技术，以去除不需要的材料或在太阳能电池上形成特定的表面结构。
4.封装：太阳能电池生产出来后，要对其进行封装，使其免受潮湿和机械应力等环境因素的影响。封装过程中使用真空泵来创造真空环境，确保从封装材料中排除空气和水分。这有助于实现适当的粘合，防止形成气泡或空隙，从而降低太阳能电池板的性能和使用寿命。
5.测试和质量控制：真空泵还可用于太阳能电池板生产过程中的测试和质量控制。例如，真空系统可用于泄漏测试，以确保封装的完整性，并检测电池板组件中任何潜在的缺陷或泄漏。真空测量技术还可用于评估太阳能电池或电池板的电气特性和效率。
总之，真空泵是太阳能电池板生产中不可或缺的设备。真空泵用于制造过程的各个阶段，包括硅锭生产、晶片、太阳能电池生产（扩散、沉积和蚀刻）、封装和测试。真空技术可实现精确控制、防止污染和高效加工，有助于生产出优质可靠的太阳能电池板。
What Industries Commonly Rely on Vacuum Pump Technology?
Vacuum pump technology finds applications in various industries where creating and controlling vacuum or low-pressure environments is crucial. Here’s a detailed explanation:
1. Manufacturing and Production: Vacuum pumps are extensively used in manufacturing and production processes across multiple industries. They are employed for tasks such as vacuum molding, vacuum packaging, vacuum degassing, vacuum drying, and vacuum distillation. Industries like automotive, aerospace, electronics, pharmaceuticals, and food processing rely on vacuum pump technology to achieve precise and controlled manufacturing conditions.
2. Chemical and Pharmaceutical: The chemical and pharmaceutical industries heavily rely on vacuum pumps for numerous applications. These include solvent recovery, vacuum filtration, vacuum drying, distillation, crystallization, and evaporation. Vacuum pumps enable these industries to carry out critical processes under reduced pressure, ensuring efficient separation, purification, and synthesis of various chemical compounds and pharmaceutical products.
3. Semiconductor and Electronics: The semiconductor and electronics industries extensively use vacuum pumps for manufacturing microchips, electronic components, and electronic devices. Vacuum pumps are crucial in processes such as physical vapor deposition (PVD), chemical vapor deposition (CVD), etching, ion implantation, and sputtering. These processes require controlled vacuum conditions to ensure precise deposition, surface modification, and contamination-free manufacturing.
4. Research and Development: Vacuum pump technology is integral to research and development activities across scientific disciplines. It supports experiments and investigations in fields such as physics, chemistry, materials science, biology, and environmental science. Vacuum pumps facilitate processes like freeze drying, vacuum distillation, vacuum evaporation, vacuum spectroscopy, and creating controlled atmospheric conditions for studying various phenomena.
5. Food and Beverage: The food and beverage industry relies on vacuum pumps for packaging and preservation purposes. Vacuum sealing is used to extend the shelf life of food products by removing air and creating a vacuum-sealed environment that inhibits spoilage and maintains freshness. Vacuum pumps are also used in processes like freeze drying, vacuum concentration, and vacuum cooling.
6. Oil and Gas: In the oil and gas industry, vacuum pumps play a role in various applications. They are used for crude oil vacuum distillation, vacuum drying, vapor recovery, gas compression, and gas stripping processes. Vacuum pumps help maintain optimal conditions during oil refining, gas processing, and petrochemical manufacturing.
7. Environmental and Waste Management: Vacuum pumps are employed in environmental and waste management applications. They are used for tasks such as soil vapor extraction, groundwater remediation, landfill gas recovery, and wastewater treatment. Vacuum pumps facilitate the removal and containment of gases, vapors, and pollutants, contributing to environmental protection and sustainable waste management.
8. Medical and Healthcare: The medical and healthcare sectors utilize vacuum pumps for various purposes. They are used in medical equipment such as vacuum-assisted wound therapy devices, vacuum-based laboratory analyzers, and vacuum suction systems in hospitals and clinics. Vacuum pumps are also used in medical research, pharmaceutical production, and medical device manufacturing.
9. Power Generation: Vacuum pumps play a role in power generation industries, including nuclear power plants and thermal power plants. They are used for steam condensation, turbine blade cooling, vacuum drying during transformer manufacturing, and vacuum systems for testing and maintenance of power plant equipment.
10. HVAC and Refrigeration: The HVAC (Heating, Ventilation, and Air Conditioning) and refrigeration industries rely on vacuum pumps for system installation, maintenance, and repair. Vacuum pumps are used to evacuate air and moisture from refrigerant lines and HVAC systems, ensuring optimal system performance and efficiency.
These are just a few examples of industries that commonly rely on vacuum pump technology. The versatility and wide-ranging applications of vacuum pumps make them indispensable tools across numerous sectors, enabling precise control over vacuum conditions, efficient manufacturing processes, and scientific investigations.
editor by CX 2024-04-16
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