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Oil Free High Speed High Vacuum Dry Pump

Higher pace turbo vacuum pump

1.Higher velocity turbo vacuum pump(600L/S) is directly geared up into a station as picture present for max. vacuum stage
2.Hefty responsibility twin phase mechanical pump, 220 liters/minute (seven.8CFM) is related to turbo pump for more quickly pumping velocity
3.Mobile pump station is integrated and the compact sputtering coater can be placed on top of station
4.Max. vacuum amount: ten^-6 torr with chamber baking


Model FF-a hundred and sixty
Pumping Velocity(/l/s,Air) 600
Inlet Flange DN160 ISO-K
Outlet Flange KF 40 (DN)
Greatest Vacuum(Pa) ≤ 6×10-4Pa
Rotation Velocity(rpm) 36000
Run-Up Time(min.) < 6
Bearing Sort Ceramic
VIB(um) ≤ 0.1
Backing Pump (l/s) four-8
Cooling Technique,optional Water
Cooling H2o Temperature(ºC) ≤ 25
Bake-out temperature(ºC) ≤ 100
Ambient Temperature (ºC) S-forty
Lubrication Oil
Mounting or lentation Vertical ±5°