Higher pace turbo vacuum pump
1.Higher velocity turbo vacuum pump(600L/S) is directly geared up into a station as picture present for max. vacuum stage
2.Hefty responsibility twin phase mechanical pump, 220 liters/minute (seven.8CFM) is related to turbo pump for more quickly pumping velocity
3.Mobile pump station is integrated and the compact sputtering coater can be placed on top of station
4.Max. vacuum amount: ten^-6 torr with chamber baking
| Model | FF-a hundred and sixty |
| Pumping Velocity(/l/s,Air) | 600 |
| Inlet Flange | DN160 ISO-K |
| Outlet Flange | KF 40 (DN) |
| Greatest Vacuum(Pa) | ≤ 6×10-4Pa |
| Rotation Velocity(rpm) | 36000 |
| Run-Up Time(min.) | < 6 |
| Bearing Sort | Ceramic |
| VIB(um) | ≤ 0.1 |
| Backing Pump (l/s) | four-8 |
| Cooling Technique,optional | Water |
| Cooling H2o Temperature(ºC) | ≤ 25 |
| Bake-out temperature(ºC) | ≤ 100 |
| Ambient Temperature (ºC) | S-forty |
| Lubrication | Oil |
| Mounting or lentation | Vertical ±5° |